SSH EN ISO 14644-6:2007

Cleanrooms and associated controlled environments - Part 6: Vocabulary (ISO 14644-6:2007)

Publication date: Apr 4, 2011

General information

Current stage: 60.60 Effective date: Apr 4, 2011

Originator: DPS

Owner: DPS/KT 230

Type: European Norm

ICS: 13.040.35

Languages: English

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Status: Published

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Scope

ISO 14644-6:2007 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments.

Life cycle

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PUBLISHED
SSH EN ISO 14644-6:2007
60.60 Standard published
Apr 4, 2011

Related project

Adopted from EN ISO 14644-6:2007

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