SSH EN ISO 14644-10:2022

Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)

Publication date: Oct 31, 2023

General information

Current stage: 60.60 Effective date: Oct 31, 2023

Originator: DPS

Owner: DPS/KT 230

Type: European Norm

ICS: 13.040.35

Languages: English

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Status: Published

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Scope

This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).

Life cycle

PREVIOUSLY

Replaces
SSH EN ISO 14644-10:2013

NOW

PUBLISHED
SSH EN ISO 14644-10:2022
60.60 Standard published
Oct 31, 2023

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