SSH EN ISO 14644-9:2022

Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022)

Publication date: Oct 31, 2023

General information

Current stage: 60.60 Effective date: Oct 31, 2023

Originator: DPS

Owner: DPS/KT 230

Type: European Norm

ICS: 13.040.35

Languages: English

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Status: Published

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Scope

This document establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in Annexes A to D.

Life cycle

PREVIOUSLY

Replaces
SSH EN ISO 14644-9:2012

NOW

PUBLISHED
SSH EN ISO 14644-9:2022
60.60 Standard published
Oct 31, 2023

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