ISO 21360-6:2023

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps

Publication date: Dec 6, 2023

General information

Current stage: 60.60 Effective date: Dec 6, 2023

Originator: ISO

Owner: ISO/TC 112

Type: International Standard

ICS: 23.160

Languages: English

Buying

Status: Published

PDF - ALL 7,123

Paper - ALL 7,123

CD - ALL 7,123

Language

Language in which you want to receive the document.

Scope

This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.
It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.

Life cycle

NOW

PUBLISHED
ISO 21360-6:2023
60.60 Standard published
Dec 6, 2023

Preview

Only informative sections of projects are publicly available. To view the full content, you will need to members of the committee. If you are a member, please log in to your account by clicking on the "Log in" button.