ISO/CD 23131-3

Ellipsometry — Part 3: Transparent single layer model

General information

Current stage: 30.60 Effective date: Jul 24, 2024

Originator: ISO

Owner: ISO/TC 107

Type: International Standard

Scope

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

Life cycle

NOW

IN_DEVELOPMENT
ISO/CD 23131-3
30.60 Close of voting/ comment period
Jul 24, 2024

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