Surface chemical analysis — General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry
General information
30.00Sep 29, 2023
ISO
ISO/TC 201/SC 8
International Standard
Scope
ISO 11505:2013 describes a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films.
It is limited to a description of general procedures of quantification of GD-OES and is not applicable directly for the quantification of individual materials having various thicknesses and elements to be determined.
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