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ISO/AWI 25164

Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification

General information

Current stage: 20.00 Effective date: 13 qer 2024

Originator: ISO

Owner: ISO/TC 107/SC 9

Type: International Standard

Scope

This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering.

Life cycle

NOW

IN_DEVELOPMENT
ISO/AWI 25164
20.00 New project registered in TC/SC work programme
13 qer 2024

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